Recent years have witnessed the flourishing of numerous novel Strategies based on the Magnetron Sputtering technique aimed at the Advanced Engineering of Thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others.
At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: Th.
Recent years have witnessed the flourishing of numerous novel Strategies based on the Magnetron Sputtering technique aimed at the Advanced Engineering of Thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others