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Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure, Paperback/Simon Fichtner

Name: Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure, Paperback/Simon Fichtner
Brand: Books on Demand
SKU: 5248a2859c8cabafd285085eba2f7ab7
Price: 218.99 RON
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Caracteristicile produsului Development of High Performance Piezoelectric

Brand: Books on Demand
Categoria: Foreign Books
Magazin: elefant.ro
Ultima actualizare: 28-03-2021 22:11:41

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The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial technological innovation. This dissertation focused on enhancing the piezoelectric properties of A

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