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The usage of Piezoelectric and Ferroelectric thin films is a promising approach to significantly increase the functionality of Microelectromechanical systems (MEMS) as well as of microelectronics in general.
This dissertation focused on enhancing the Piezoelectric properties of A.
Since the device Performance thus becomes directly connected to the properties of the functional film, new as well as improved Piezoelectric and Ferroelectric materials can allow substantial technological innovation.
The usage of Piezoelectric and Ferroelectric thin films is a promising approach to significantly increase the functionality of Microelectromechanical systems (MEMS) as well as of microelectronics in general
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