Practical Mems focuses on analyzing the operational principles of microsystems.
Practical Mems is a perfect companion to Mems fabricati.
Second, the Design equations are derived and exemplified.
First, the physical operation principles are covered.
This book focuses on the microdevice operation.
Emphasis on design.
The book emphasizes the Design and analysis through over 100 calculated examples covering all aspects of Mems design.
The salient features of the book include: Tutorial approach.
Practical Mems focuses on analyzing the operational principles of microsystems