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Description The rapidly Advancing Silicon Carbide Technology has a great potential in high temperature and high frequency electronics.
Topics covered include: SiC surface cleaning and etching techniques; electrical characterization methods and pro.
The present volume presents the state of the art of SiC device fabrication and characterization.
High thermal stability and outstanding chemical inertness make SiC an excellent material for high-power, low-loss semiconductor devices.
Description The rapidly Advancing Silicon Carbide Technology has a great potential in high temperature and high frequency electronics
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