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This edited volume discusses Atomic Layer Deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines..
This edited volume discusses Atomic Layer Deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.
Uneori, aceste descrieri pot contine inadvertente. De asemenea, imaginea este informativa si poate contine accesorii neincluse in pachetele standard.
